tantalum DoS 99.99 vatlhvI' planar DoS

product details

pong product:tantalum sputter DoS

execution Hol: b708-98

specifications: diameter circular DoS (25-400) mm (3-28) mm * thickness

DoS specifications meyrI': thickness bIr mIw wIje'laHbe'chugh vaj (1-12.7) mm * (10-600) mm * 'ab width (200-2000) mm

tolerance: diameter tolerance + ghap-0.254

brand: ro5200, ro5400, ro5252 (ta-2.5w), ro5255 (ta-10w)

tlhIv je SoHbogh: 99.9 vatlhvI'

recrystallization: qaSlaH 95 vatlhvI'

size mInwIj: 40 m minimum

roughness ghor: ra 0.8 'aqroS

flatness: pagh 0.1 mm 0.10 vatlhvI' 'aqroS.

tantalum jengva' DoS

chemical compostion

gr

potlhmo'

latlhpu' max vatlhvI'

ta

nb

fe

si

ni

W

mo

qaSbe'bej ghu'

nb

QU'VATLH

[TAH

H

N

ta1

qawmoH

——

0.005

0.005

0.002

0.01

0.01

0.002

0.04

0.02

0.01

0.0015

0.01

ta2

qawmoH

——

0.03

0.02

0.005

0.04

0.03

0.005

0.1

0.03

0.01

0.0015

0.01

tanb3

qawmoH

<3.5

0.03

0.03

0.005

0.04

0.03

0.005

——

0.03

0.01

0.0015

0.01

tanb20

qawmoH

17.0~23.0

0.03

0.03

0.005

0.04

0.03

0.005

——

0.03

0.01

0.0015

0.01

ta2.5w

qawmoH


0.005

0.005

0.002

3.0

0.01

0.002

0.04

0.02

0.01

0.0015

0.01

ta10w

qawmoH


0.005

0.005

0.002

11

0.01

0.002

0.04

0.02

0.01

0.0015

0.01




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